Corresponding to the loading and unloading of different types of sputter machine, it is suitable for handling wafer frames or square frames up to 12 inches size and can be used to transfer materials between the front and rear buffer stages of sputter.
Suitable for various trays, with the ability to program and buffer the position of wafer frames
Uses high-precision 4/6-axis robot arms with visual recognition for material handling
Unloading buffer section can storage up to 10 products
Compatible with square frames with a maximum size of 250x250mm.
Equipped with an ion knife cleaning mechanism
| project | Specification Description |
|---|---|
| UPH | ＞60pcs |
| Frame / Carrier Transfer | Vacuum suction/electric grip/cylinder |
| Placement Accuracy | ±0.05mm |
| Frame Size | ≤250x250mm square frame |
| Scanning Accuracy | >99.99% |
| Clean Function | Ion knife cleaning |
